Title: Impact of the plasma ambient and the ruthenium precursor on the growth of ruthenium films by plasma enhanced atomic layer deposition
Authors: Swerts, Johan
Delabie, Annelies
Salimullah M. M., Salimullah
Popovici, Mihaela Ioana
Kim, Min-Soo
Schaekers, Marc
Van Elshocht, Sven
Issue Date: 2012
Publisher: The Electrochemical Society
Series Title: ECS Solid State Letters vol:1 issue:2 pages:P19-P21
ISSN: 2162-8726
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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