|ITEM METADATA RECORD
|Title: ||Surface passivation for Si solar cells: a combination of advanced surface cleaning and thermal atomic layer deposition of Al2O3|
|Authors: ||Vermang, Bart|
|Issue Date: ||2012 |
|Publisher: ||Sci-Tech Publications|
|Host Document: ||Diffusion and Defect Data B, Solid State Phenomena vol:187 pages:357-361|
|Conference: ||10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2010) location:Ostend, BELGIUM date:20-22 sept 2010|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||ESAT - ELECTA, Electrical Energy Computer Architectures|
Associated Section of ESAT - INSYS, Integrated Systems
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