Title: Surface passivation for Si solar cells: a combination of advanced surface cleaning and thermal atomic layer deposition of Al2O3
Authors: Vermang, Bart
Rothschild, Aude
Kenis, Karine
Wostyn, Kurt
Bearda, Twan
Racz, A
Loozen, Xavier
Mertens, Paul
Poortmans, Jef
Mertens, Robert
Issue Date: 2012
Publisher: Sci-Tech Publications
Host Document: Diffusion and Defect Data B, Solid State Phenomena vol:187 pages:357-361
Conference: 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2010) location:Ostend, BELGIUM date:20-22 sept 2010
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - ELECTA, Electrical Energy Computer Architectures
Associated Section of ESAT - INSYS, Integrated Systems

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