Title: A DC-pulsed capacitively-coupled planar Langmuir probe for plasma process diagnostics and monitoring
Authors: Samara, Vladimir
Booth, Jean-Paul
de Marneffe, Jean-Francois
Milenin, Alexey
Brouri, Mohand
Boullart, Werner
Issue Date: 2012
Publisher: IOP Pub.
Series Title: Plasma Sources Science & Technology vol:21 issue:6 pages:65004
ISSN: 0963-0252
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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