Title: Study of SF6/N2O microwave plasma for surface texturing of multi-crystalline (< 150 µm) solar substrates
Authors: Chan, BT ×
Kunnen, Eddy
Uhlig, Matthias
de Marneffe, Jean-Francois
Xu, Kaidong
Boullart, Werner
Rau, Bernd
Poortmans, Jef #
Issue Date: 2012
Publisher: Publication Board, Japanese Journal of Applied Physics
Series Title: Japanese Journal of Applied Physics 1, Regular Papers, Short Notes & Review Papers vol:51 issue:10_2 pages:10NA01
Article number: 10NA01
ISSN: 0021-4922
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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