Title: Linking EUV lithography line edge roughness and 16 nm NAND memory performance
Authors: Vaglio Pret, Alessandro
Poliakov, Pavel
Gronheid, Roel
Blomme, Pieter
Miranda Corbalan, Miguel
Dehaene, Wim
Verkest, Diederik
Van Houdt, Jan
Bianchi, Davide
Issue Date: 2012
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:98 issue:10 pages:24-28
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors

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