Title: SiGe MEMS at processing temperatures below 250C
Authors: El Rifai, Joumana ×
Sedky, Sherif
Van Hoof, Rita
Severi, Simone
Lin, Dennis
Sangameswaran, Sandeep
Puers, Bob
Van Hoof, Chris
Witvrouw, Ann #
Issue Date: 2012
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:188 pages:230-239
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Physics and Astronomy - miscellaneous
Production Engineering, Machine Design and Automation (PMA) Section
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science