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Title: Spectroscopic study of polysilicon traps by means of fast capacitance transients
Authors: Toledano Luque, Maria
Tang, Baojun
Degraeve, Robin
Kaczer, Ben
Simoen, Eddy
Van Houdt, Jan
Groeseneken, Guido
Issue Date: 2012
Conference: 17th Workshop on Dielectrics in Microelectronics - WoDiM location:Dresden Germany date:25/06/2012
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors

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