Title: Void detection in copper interconnects using energy dispersive X-ray spectroscopy
Authors: Tsigkourakos, Menelaos
Vandervorst, Wilfried
Hantschel, Thomas
Franquet, Alexis
Conard, Thierry
Carbonell, Laure
Issue Date: 2012
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:30 issue:5 pages:51803
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section

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