|ITEM METADATA RECORD
|Title: ||Void detection in copper interconnects using energy dispersive X-ray spectroscopy|
|Authors: ||Tsigkourakos, Menelaos|
|Issue Date: ||2012 |
|Publisher: ||Published for the Society by the American Institute of Physics|
|Series Title: ||Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:30 issue:5 pages:51803|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Nuclear and Radiation Physics Section|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.
© Web of science