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Title: Study of chemical vapor deposition of manganese on porous SiCOH low-k dielectrics using Bis(ethylcyclopentadienyl)manganese
Authors: Jourdan, Nicolas
Krishtab, Mikhail
Baklanov, Mikhaïl
Meersschaut, Johan
Wilson, Chris
Ablett, J
Fonda, E
Zhao, Larry
Van Elshocht, Sven
Tokei, Zsolt
Vancoille, Eric
Issue Date: 2012
Publisher: The Electrochemical Society
Series Title: Electrochemical and Solid-State Letters vol:15 issue:5 pages:H176-H178
ISSN: 1099-0062
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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