Title: Capacitance measurements of 2-dimensional and 3-dimensional IC interconnect structures by quasi-static C-V technique
Authors: Stucchi, Michele
Velenis, Dimitrios
Katti, Guruprasad
Issue Date: 2012
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE Transactions on Instrumentation and Measurement vol:61 issue:7 pages:1979-1990
ISSN: 0018-9456
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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