|ITEM METADATA RECORD
|Title: ||Capacitance measurements of 2-dimensional and 3-dimensional IC interconnect structures by quasi-static C-V technique|
|Authors: ||Stucchi, Michele|
|Issue Date: ||2012 |
|Publisher: ||Institute of Electrical and Electronics Engineers|
|Series Title: ||IEEE Transactions on Instrumentation and Measurement vol:61 issue:7 pages:1979-1990|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Non-KU Leuven Association publications|
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