Title: Non-oxidizing solvent-based strip of ion implanted photoresist
Authors: Tsvetanova, Diana
Vos, Rita
Vanstreels, Kris
Radisic, Dunja
Sonnemans, Roger
Berry, Ivan
Waldfried, Carlo
Mattson, David
DeLuca, J
Vereecke, Guy
Mertens, Paul
Parac-Vogt, Tatjana
Heyns, Marc
Issue Date: 2012
Publisher: Sci-Tech Publications
Host Document: Diffusion and Defect Data B, Solid State Phenomena vol:187 pages:97-100
Conference: International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS 2010) edition:10th location:Ostend, BELGIUM date:SEP 20-22, 2010
Description: proceedings paper
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Surface and Interface Engineered Materials
Molecular Design and Synthesis

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