ITEM METADATA RECORD
Title: Epitaxy of III-V based channels on Si and transistor integration for 12-nm node CMOS
Authors: Caymax, Matty
Merckling, Clement
Wang, Gang
Orzali, Tommaso
Guo, Weiming
Vandervorst, Wilfried
Dekoster, Johan
Waldron, Niamh
Thean, Aaron
Issue Date: 2012
Host Document: 24th Conference on Indium Phosphide and Related Materials - IPRM
Conference: 24th Conference on Indium Phosphide and Related Materials - IPRM location:Santa Barbara, CA USA date:27/08/2012
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.

© Web of science