Title: XRD investigation of the crystalline quality of Sn-doped ß-Ga2O3 films deposited by the RF magnetron sputtering method
Authors: Kudou, Jyun
Funasaki, Suguru
Takahara, Motoki
Takakura, Kenichiro
Ohyama, Hidenori
Nakashima, Toshiyuki
Shibuya, Mutsuo
Murakami, Katsuya
Simoen, Eddy
Claeys, Cor
Issue Date: 2012
Publisher: Trans Tech Publications
Host Document: Materials Science Forum vol:725 pages:269-272
Conference: International Conference on Defects-Recognition, Imaging and Physics in Semiconductors edition:14th location:Miyazaki, JAPAN date:SEP 25-29, 2011
Description: proceedings paper
ISSN: 0255-5476
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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