Title: Considerations for further scaling of Metal-Insulator-Metal DRAM capacitors
Authors: Kaczer, Ben
Clima, Sergiu
Tomida, Kazuyuki
Govoreanu, Bogdan
Popovici, Mihaela Ioana
Kim, Min-Soo
Swerts, Johan
Belmonte, Attilio
Wang, W.-C
Afanas'ev, V. V
Verhulst, Anne
Pourtois, Geoffrey
Groeseneken, Guido
Jurczak, Malgorzata
Issue Date: 2012
Conference: 17th Workshop on Dielectrics in Microelectronics - WoDiM location:Dresden Germany date:25/06/2012
Publication status: published
KU Leuven publication type: IMa
Appears in Collections:Semiconductor Physics Section
ESAT - MICAS, Microelectronics and Sensors

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