This item still needs to be validated !
Title: CMOS compatible polycrystalline silicon-germanium based pressure sensors
Authors: Gonzalez, Pilar ×
Guo, Bin
Rakowski, Michal
Severi, Simone
De Meyer, Kristin
Witvrouw, Ann
Issue Date: 2012
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:188 pages:9-18
Conference: 16th International Conference on Solid-State Sensors, Actuators and Microsystems - Transducers location:Beijing China date:06/05/2011
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
ESAT - MICAS, Microelectronics and Sensors
Physics and Astronomy - miscellaneous
× corresponding author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science