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|ITEM METADATA RECORD
|Title: ||CMOS compatible polycrystalline silicon-germanium based pressure sensors|
|Authors: ||Gonzalez, Pilar ×|
De Meyer, Kristin
|Issue Date: ||2012 |
|Publisher: ||Elsevier Science Pub. Co.|
|Series Title: ||Sensors and Actuators A, Physical vol:188 pages:9-18|
|Conference: ||16th International Conference on Solid-State Sensors, Actuators and Microsystems - Transducers location:Beijing China date:06/05/2011|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
ESAT - MICAS, Microelectronics and Sensors
Physics and Astronomy - miscellaneous
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