Title: Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves
Authors: Rudra, Sukumar
De Coster, Jeroen
Van Hoof, Rita
Bryce, George
Severi, Simone
Witvrouw, Ann
Van Thourhout, Dries
Issue Date: 2012
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:179 pages:283-290
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science