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Title: Static and dynamic characterization of pull-in protected CMOS compatible poly-SiGe grating light valves
Authors: Rudra, Sukumar
De Coster, Jeroen
Van Hoof, Rita
Bryce, George
Severi, Simone
Witvrouw, Ann
Van Thourhout, Dries
Issue Date: 2012
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:179 pages:283-290
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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