Title: Oxide trapping in InGaAs-Al2O3 system and the role of sulfur in reducing the Al2O3 trap density
Authors: Alian, AliReza
Brammertz, Guy
Degraeve, Robin
Cho, Moon Ju
Merckling, Clement
Lin, Dennis
Wang, Wei-E
Caymax, Matty
Meuris, Marc
De Meyer, Kristin
Heyns, Marc
Issue Date: 2012
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE Electron Device Letters vol:33 issue:11 pages:1544-1546
ISSN: 0741-3106
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Surface and Interface Engineered Materials

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