Title: Aluminium implantation in germanium: uphill diffusion, electrical activation and trapping
Authors: Impellizzeri, Giuliana
Napolitani, Enrico
Boninelli, Simona
Privitera, Vittorio
Clarysse, Trudo
Vandervorst, Wilfried
Priolo, Francesco
Issue Date: 2012
Publisher: Institute of Pure and Applied Physics
Series Title: Applied Physics Express vol:5 issue:2 pages:21301
ISSN: 1882-0778
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section

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