Title: On the efficiency of stress techniques in gate-last n-type bulk FinFETs
Authors: Eneman, Geert
Collaert, Nadine
Veloso, Anabela
De Keersgieter, An
De Meyer, Kristin
Hoffmann, Thomas
Horiguchi, Naoto
Thean, Aaron
Issue Date: 2012
Publisher: Pergamon Press
Series Title: Solid-State Electronics vol:74 pages:19-24
ISSN: 0038-1101
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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