Title: Time-dependent dielectric breakdown on subnanometer EOT nMOS FinFETs
Authors: Feijoo, Pedro C
Kauerauf, Thomas
Toledano Luque, Maria
Togo, Mitsuhiro
San Andrés, Enrique
Groeseneken, Guido
Issue Date: 2012
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE Transactions on Device and Materials Reliability vol:12 issue:1 pages:166-170
ISSN: 1530-4388
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors

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