Title: Relationship between film thickness loss and polymer deprotection for extreme ultraviolet and ArF photoresists
Authors: Winroth, Gustaf
Younkin, Todd
Blackwell, James M
Gronheid, Roel
Issue Date: 2012
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:30 issue:6 pages:06FG01
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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