Title: CMOS-integrated poly-SiGe piezoresistive pressure sensor
Authors: Gonzalez, Pilar
Rakowski, Michal
San Segundo Bello, David
Severi, Simone
De Meyer, Kristin
Witvrouw, Ann
Issue Date: 2012
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE Electron Device Letters vol:33 issue:8 pages:1204-1206
ISSN: 0741-3106
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
Physics and Astronomy - miscellaneous

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