Title: TiN scanning probes for electrical profiling of nanoelectronics device structures
Authors: Hantschel, Thomas
Schulze, Andreas
Celano, Umberto
Moussa, Alain
Arstila, Kai
Eyben, Pierre
Majeed, Bivragh
Sabuncuoglu Tezcan, Deniz
Werner, Thilo
Vandervorst, Wilfried
Issue Date: 2012
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:97 pages:255-258
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Nuclear and Radiation Physics Section

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