ITEM METADATA RECORD
Title: Characterization of chemically vapor deposited manganese barrier layers using X-ray absorption fine structure
Authors: Ablett, James
Wilson, Chris
Phuong, Nguyen Mai
Koike, Junichi
Tokei, Zsolt
Sterbinsky, George
Woicik, Joseph
Issue Date: 2012
Publisher: Publication Board, Japanese Journal of Applied Physics
Series Title: Japanese Journal of Applied Physics 1, Regular Papers, Short Notes & Review Papers vol:51 issue:5 pages:05EB01
ISSN: 0021-4922
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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