|ITEM METADATA RECORD
|Title: ||Cleaning of III-V Materials: Surface Chemistry Considerations|
|Authors: ||van Dorp, Dennis H|
De Gendt, Stefan
|Issue Date: ||2013 |
|Publisher: ||Sci-Tech Publications|
|Host Document: ||Diffusion and Defect Data B, Solid State Phenomena vol:195 pages:98-99|
|Conference: ||11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) location:Gent: BELGIUM date:SEP 17-19, 2012|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Molecular Design and Synthesis|
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