Title: Cleaning of III-V Materials: Surface Chemistry Considerations
Authors: van Dorp, Dennis H
Cuypers, Daniel
Arnauts, Sophia
Mertens, Paul
De Gendt, Stefan
Issue Date: 2013
Publisher: Sci-Tech Publications
Host Document: Diffusion and Defect Data B, Solid State Phenomena vol:195 pages:98-99
Conference: 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) location:Gent: BELGIUM date:SEP 17-19, 2012
ISBN: *****************
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis

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