ITEM METADATA RECORD
Title: 'Just clean enough': wet cleaning for solar cell manufacturing applications
Authors: Wostyn, Kurt
Baekelant, Wouter
Rip, Jens
Haslinger, Michael
Kenis, Karine
Struyf, Herbert
Claes, Martine
Mertens, Paul
De Gendt, Stefan
Issue Date: 2013
Publisher: Sci-Tech Publications
Host Document: Diffusion and Defect Data B, Solid State Phenomena vol:195 pages:293-296
Conference: 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) location:Gent: BELGIUM date:SEP 17-19, 2012
ISBN: *****************
ISSN: 1012-0394
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Molecular Design and Synthesis

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