ITEM METADATA RECORD
Title: Nanoscale and device level electrical behavior of annealed ALD Hf-based gate oxide stacks grown with different precursors
Authors: Bayerl, Albin ×
Lanza, Mario
Aguilera, Lidia
Porti, Marc
Nafria, Montserrat
Aymerich, Xavier
De Gendt, Stefan #
Issue Date: 2013
Publisher: PERGAMON-ELSEVIER SCIENCE LTD
Series Title: Microelectronics Reliability vol:53 issue:6 pages:867-871
ISSN: 0026-2714
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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