EUSPEN, Date: 2013/05/27 - 2013/05/31, Location: Berlin
Publication date:
2013-05-27
Pages:
175 -
178
ISSN:
9780956679024
Publisher:
EUSPEN; Bedford
Proceding of the 13th euspen International Conference Berlin
Author:
Santoso, Anindito
Peirs, Jan ; Al-Bender, Farid ; Reynaerts, Dominiek
Abstract:
This work aims at the development of a fast nanometer positioning system, combining the high speed capability of an ultrasonic piezomotors (resonant mode) with the fine positioning capability of a piezostacks (direct-drive mode). The two modes can be operated simultaneously with capability of achieving speed of more than 200 mm/s and positioning accuracy of 10 nm.