Title: Determining the random measurement errors of a novel moving-scale measurement system with nanometre uncertainty
Authors: Bosmans, Niels ×
Qian, Jun
Reynaerts, Dominiek #
Issue Date: 27-May-2013
Publisher: euspen
Host Document: Proceedings of the 13th international conference of the european society for precision engineering and nanotechnology vol:1 pages:240-243
Conference: Euspen 13th international conference edition:13 location:Berlin date:27-31 May 2013
Article number: P3.15
Abstract: This paper describes a setup with a low sensitivity to temperature variations for determining the random measurement errors of a measurement system applying a moving scale. This moving-scale system is developed for advanced equipment such as ultra-precision machine tools and should operate with a measurement uncertainty of 15 nm for a measurement length of 109 mm and temperature variations of 1°C. Temperature drift is identified as the most contributing source of errors and therefore should be accurately determined. A dedicated setup has been designed for this task.
ISBN: 978-0-9566790-2-4
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Production Engineering, Machine Design and Automation (PMA) Section
× corresponding author
# (joint) last author

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