Title: Experimental determination of the maximum post-process annealing temperature for standard CMOS wafers
Authors: Sedky, S ×
Witvrouw, Ann
Bender, H
Baert, Kris #
Issue Date: 2001
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE Transactions on Electron Devices vol:48 issue:2 pages:377-385
ISSN: 0018-9383
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science