Title: Determination of stress profile and optimization of stress gradient in PECVD poly-SiGe films
Authors: Molfese, A ×
Mehta, A
Witvrouw, Ann
Issue Date: 2005
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:118 issue:2 pages:313-321
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author

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