|ITEM METADATA RECORD
|Title: ||Determination of stress profile and optimization of stress gradient in PECVD poly-SiGe films|
|Authors: ||Molfese, A ×|
|Issue Date: ||2005 |
|Publisher: ||Elsevier Science Pub. Co.|
|Series Title: ||Sensors and Actuators A, Physical vol:118 issue:2 pages:313-321|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Non-KU Leuven Association publications|
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