Title: Optimal conditions for micromachining Si1-xGex at 210 degrees C
Authors: Sedky, Sherif ×
Bayoumy, Ahmed
Alaa, Ahmed
Nagy, Ahmed
Witvrouw, Ann
Issue Date: 2007
Publisher: Institute of Electrical and Electronics Engineers
Series Title: Journal of Microelectromechanical Systems vol:16 issue:3 pages:581-588
ISSN: 1057-7157
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science