Title: The use of functionally graded poly-SiGe layers for MEMS applications
Authors: Witvrouw, Ann ×
Mehta, A #
Issue Date: 2005
Publisher: Trans Tech Publications
Series Title: Materials Science Forum vol:492-493 pages:255-260
Conference: 8th International Symposium on Multifunctional and Functionally Graded Materials (FMG2004) location:Leuven, Belgium date:Jul 11-14 2004
ISBN: 0-87849-970-9
ISSN: 0255-5476
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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