ITEM METADATA RECORD
Title: Poly SiGe, a promising material for MEMS monolithic integration with the driving electronics
Authors: Sedky, S ×
Witvrouw, Ann
Baert, Kris #
Issue Date: 2002
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:97-8 pages:503-511
Conference: Transducers 2001 Conference/Eurosensor XVth Conference location:MUNICH: GERMANY date:JUN 10-14, 2001
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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