|ITEM METADATA RECORD
|Title: ||Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process|
|Authors: ||Rusu, C ×|
|Issue Date: ||2004 |
|Series Title: ||Microsystem Technologies vol:10 issue:5 pages:364-371|
|Conference: ||Symposium on Design, Test, Integratives and Packaging of MEMS/MOEMS location:Cannes: FRANCE date:MAY 05-07, 2003|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Non-KU Leuven Association publications|
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.
© Web of science