Title: Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process
Authors: Rusu, C ×
Jansen, H
Gunn, R
Witvrouw, Ann
Issue Date: 2004
Publisher: Springer-Verlag
Series Title: Microsystem Technologies vol:10 issue:5 pages:364-371
Conference: Symposium on Design, Test, Integratives and Packaging of MEMS/MOEMS location:Cannes: FRANCE date:MAY 05-07, 2003
ISSN: 0946-7076
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author

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