Title: New low-stress PECVD poly-SiGe layers for MEMS
Authors: Rusu, C
Sedky, S
Parmentier, B
Verbist, A
Richard, O
Brijs, B
Geenen, L
Witvrouw, Ann
Larmer, F
Fischer, F
Kronmuller, S
Leca, V
Otter, B #
Issue Date: 2003
Publisher: Institute of Electrical and Electronics Engineers
Series Title: Journal of Microelectromechanical Systems vol:12 issue:6 pages:816-825
ISSN: 1057-7157
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
# (joint) last author

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