Title: Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer
Authors: Hochst, A
Scheuerer, R
Stahl, H
Fischer, F
Metzger, L
Reichenbach, R
Larmer, F
Kronmuller, S
Watcham, S
Rusu, C
Witvrouw, Ann
Gunn, R #
Issue Date: 2004
Publisher: Elsevier Science Pub. Co.
Series Title: Sensors and Actuators A, Physical vol:114 issue:2-3 pages:355-361
Conference: 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03) location:BOSTON: MA date:JUN 08-12, 2003
ISSN: 0924-4247
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
# (joint) last author

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