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Title: The influence of geometrical imperfections in micromachined cantilevers on the extracted Young's modulus using a simple model
Authors: Van Barel, Gregory ×
De Ceuninck, Ward
Witvrouw, Ann #
Issue Date: 2008
Publisher: IOP Publishing Ltd.
Series Title: Journal of Micromechanics and Microengineering vol:18 issue:11
Article number: 115027
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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