Title: CMOS-MEMS integration today and tomorrow
Authors: Witvrouw, Ann
Issue Date: 2008
Publisher: Pergamon
Series Title: Scripta Materialia vol:59 issue:9 pages:945-949
ISSN: 1359-6462
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications

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