Title: Stress relaxation in Al(Cu) thin films
Authors: Proost, Joris ×
Witvrouw, A
Cosemans, P
Roussel, P
Maex, Karen #
Issue Date: 1997
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:33 issue:1-4 pages:137-147
Conference: Proceedings of the Symposium J on Advanced Materials for Interconnections of the 1996 E-MRS Spring Meeting Conference location:STRASBOURG: FRANCE date:JUN 04-07, 1996
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Non-KU Leuven Association publications
× corresponding author
# (joint) last author

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