Author:

Abstract:

In this work, a nanometer accurate 2D-orbit model is developed for analysing the influence of the minutest details affecting the radial error motion of a porous aerostatic journal bearing. This allows us to increase the running accuracy of an axis of rotation system, such as an aerostatic spindle or rotary table, to the sub-nanometer level. The orbit model is validated experimentally by measuring the radial error motion of a porous aerostatic rotary table with the use of a special measurement technique. The difference between the outcome of the orbit model and radial error motion of the rotary table under test is only 6 nm.