Title: Fabrication process for tall, sharp, hollow, high aspect ratio polymer microneedles on a platform
Authors: Ceyssens, Frederik ×
Chaudhuri, Buddhadev Paul
Van Hoof, Chris
Puers, Bob #
Issue Date: 2013
Publisher: IOP Publishing Ltd.
Series Title: Journal of Micromechanics and Microengineering vol:23 issue:7
Article number: 075023
Abstract: This paper reports on a new lithographic process for fabricating arrays of tall, high aspect ratio (defined as height/wall thickness), hollow, polymer microneedles on a platform. The microneedles feature a high sharpness (down to 3 µm tip radius) and aspect ratio (>65) which is a factor 2 and 4 better than the state of the art, respectively. The maximum achievable needle shaft length is over 1 mm. The improved performance was obtained by using an anisotropically patterned silicon substrate covered with an antireflective layer as mold for the needle tip and an optimized SU-8 lithographic process. Furthermore, a platform containing liquid feedthroughs holding an arbitrary number of needles out of plane can be manufactured with only one additional process step.
The high aspect ratio microneedles undergo failure at the critical load of around 230 mN in case of 1 mm long hollow needles with triangular cross-section and a base of 175 µm. Penetration into human skin is demonstrated as well.
ISSN: 0960-1317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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