Title: Materials issues in the processing, the operation and the reliability of MEMS
Authors: Witvrouw, Ann ×
Tilmans, HAC
De Wolf, Ingrid #
Issue Date: 2004
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:76 issue:1-4 pages:245-257
Conference: European Workshop on Materials for Advanced Metallization (MAM2004) location:Brussels, Belgium date:7-10 March 2004
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Structural Composites and Alloys, Integrity and Nondestructive Testing
Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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