Title: Effect of the functionalization process on the performance of SiGe MEM resonators used for bio-molecular sensing
Authors: Khaled, A ×
Raoof, M
Cherman, V
Jans, K
Abbas, M
Ebrahim, Sh
Bryce, G
Verheyen, P
Witvrouw, Ann
De Wolf, Ingrid #
Issue Date: 2012
Series Title: Microelectronics Reliability vol:52 issue:9-10 pages:2272-2277
Conference: 23rd European Symposium on the Reliability of Electron Devices, Failure Physics and Analysis (ESREF) in Conjunction with the 3rd International Symposium on Reliability of Optoelectronics for Space (ISROS) location:Cagliari, Italy date:1-5 October 2012
ISSN: 0026-2714
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Structural Composites and Alloys, Integrity and Nondestructive Testing
Physics and Astronomy - miscellaneous
× corresponding author
# (joint) last author

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