Title: Non-destructive characterization of saw damage in silicon photovoltaics substrates by means of photomodulated optical reflectance
Authors: Bogdanowicz, Janusz
Mertens, P.W.
Cornagliotti, E
Wostyn, K.
Penaud, J.
Jaffrennou, P.
Abric, E.
Vandervorst, Wilfried
Issue Date: 29-Aug-2012
Publisher: Wiley-VCH
Host Document: Physica Status Solidi C vol:9 issue:10-11 pages:2116-2119
Conference: European Materials Research Society Spring Meeting edition:2012 location:Strasbourg date:14-18 May 2012
Abstract: In order to minimize the considerable loss of Si material
during the processing of a silicon photovoltaics (PV)
substrate into a solar cell, the optimization of the saw
damage (SD) removal is an important step. The PV cell
process therefore requires a routine metrology solution
suitable to probe the SD present in the substrate. Though
cross-sectional Transmission Electron Microscopy is typically
used for this purpose, this technique is not suited
for in-line measurements. It is furthermore destructive,
time-consuming and limited to very small sampling volumes.
In this paper, we demonstrate the capabilities of
the Photomodulated Optical Reflectance (PMOR) method
for the in-line measurement of SD. PMOR is a laserbased
pump-probe technique, wherein the probe laser
measures the reflectance of the sample (DC reflectance)
as well as the change in reflectance (AC reflectance)
which the pump laser has induced by optically injecting
excess carriers and heat. As PMOR is a local and nondestructive
technique, it offers a very promising approach
for the simultaneous characterization of roughness and
SD. We demonstrate the versatility of this approach and
the response of the DC and AC reflectances when studying
wafers which have undergone successive etchings to
remove the SD sequentially
ISSN: 1610-1634
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Nuclear and Radiation Physics Section

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