ITEM METADATA RECORD
Title: Electron Trap Energy Distribution in ALD Al2O3, LaAl4Ox, and GdyAl2-yO3 Layers on Silicon
Authors: Wang, Wan-Chih
Badylevich, M
Adelmann, C
Swerts, Jan
Kittl, Jorge
Afanas'ev, Valeri
Issue Date: 2012
Publisher: IOP PUBLISHING LTD
Host Document: E-MRS 2012 SPRING MEETING, SYMPOSIUM M: MORE THAN MOORE: NOVEL MATERIALS APPROACHES FOR FUNCTIONALIZED SILICON BASED MICROELECTRONICS vol:41 pages:1-4
Series Title: IOP Conference Series-Materials Science and Engineering
Conference: Symposium M on More than Moore - Novel Materials Approaches for Functionalized Silicon Based Microelectronics at Spring Meeting of the European-Materials-Research-Society (E-MRS) location:Strasbourg: FRANCE date:MAY 14-18, 2012
Article number: 012008
Description: DOI: 10.1088/1757-899X/41/1/012008
ISBN: *****************
ISSN: 1757-8981
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Semiconductor Physics Section

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