Title: Considerations for further scaling of metal-insulator-metal DRAM capacitors
Authors: Kaczer, Ben ×
Clima, Sergiu
Tomida, Kazuyuki
Govoreanu, Bogdan
Popovici, Mihaela Ioana
Kim, Min-Soo
Swerts, Jan
Belmonte, Attilio
Wang, Wan-Chih
Afanas'ev, Valeri
Verhulst, Anne
Pourtois, Geoffrey
Groeseneken, Guido
Jurczak, Malgorzata #
Issue Date: Jan-2013
Publisher: Published for the Society by the American Institute of Physics
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:31 issue:1 pages:064504 -1-064504 -6
Article number: 064504
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Semiconductor Physics Section
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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