Title: New Mechanisms for Ozone-Based ALD Growth of High-k Dielectrics via Nitrogen-Oxygen Species
Authors: Jung, Sung-hoon
Raisanen, Petri I
Givens, Michael E
Shero, Eric J
Delabie, Annelies
Swerts, Johan
van Elshocht, Sven
Maes, Jan Willem #
Issue Date: 2010
Host Document: ATOMIC LAYER DEPOSITION APPLICATIONS 6 vol:33 issue:2 pages:91-99
Conference: 6th Symposium on Atomic Layer Deposition Applications as Part of the 218th Meeting of the Electrochemical-Society (ECS) location:Las Vegas: NV date:OCT 10-15, 2010
ISBN: 978-1-60768-171-7
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Quantum Chemistry and Physical Chemistry Section
# (joint) last author

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