Title: Plasma Enhanced Atomic Layer Deposited Ruthenium for MIMCAP Applications
Authors: Swerts, Jan
Salimullah, M. M
Popovici, M
Kim, M. -S
Pawlak, M. A
Delabie, A
Schaekers, M
Tomida, K
Kaczer, B
Opsomer, K
Vrancken, C
Debusschere, I
Altimime, L
Kittl, J. A
Van Elshocht, S #
Issue Date: 2011
Host Document: ATOMIC LAYER DEPOSITION APPLICATIONS 7 vol:41 issue:2 pages:41-51
Conference: 7th Symposium on Atomic Layer Deposition Applications/220th Meeting of the Electrochemical-Society (ECS) location:Boston: MA date:OCT 10-12, 2011
ISBN: 978-1-60768-256-1
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Quantum Chemistry and Physical Chemistry Section
# (joint) last author

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