ITEM METADATA RECORD
Title: ALD Barrier Deposition on Porous Low-k Dielectric Materials for Interconnects
Authors: Van Elshocht, Sven
Delabie, Annelies
Dewilde, Sven
Meersschaut, Johan
Swerts, Johan
Tielens, Hilde
Verdonck, Patrick
Witters, Thomas
Vancoille, Eric #
Issue Date: 2011
Publisher: ELECTROCHEMICAL SOC INC
Host Document: ATOMIC LAYER DEPOSITION APPLICATIONS 7 vol:41 issue:2 pages:25-32
Conference: 7th Symposium on Atomic Layer Deposition Applications/220th Meeting of the Electrochemical-Society (ECS) location:Boston: MA date:OCT 10-12, 2011
ISBN: 978-1-60768-256-1
ISSN: 1938-5862
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Non-KU Leuven Association publications
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy

 




All items in Lirias are protected by copyright, with all rights reserved.

© Web of science